第十四届全国表面工程大会

368 / 2022-10-06 16:16:43

激光转移非晶ITO薄膜的性质分析

ITO

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As a non-contact digital printing technology, Laser-induced forward transfer generates high-resolution graphic films by depositing thin film materials from donor plate to recipient surface using high-energy pulsed laser beam as driving force.  At present, the technology has successfully prepared solar cells, thin film transistors, chemical sensors and so on.  However, the lossless patternless transfer of ceramic film restricts its further application in photoelectric devices and other fields.

 Amorphous ITO semiconductor film with wide transparent range and good electrical conductivity has been prepared by magnetic-controlled sputtering and annealing at room temperature.  The results of UV-Vis (PERSEE TU-1810) measurements show that the average transmittance of ITO films deposited on molten quartz substrate reaches 80% in the visible light range (380 nm-750 nm).  The conductivity and carrier concentration (N) were measured by hall effect system. The results show that the conductivity is 2.088*10³ S/cm, and the N is about 1.05*10²¹ cm^-3.  A 100 nm triazene polymer film was first rotated between ITO and quartz substrate. The donor film was patterned by uv pulsed laser beam (355 nm, 30 ns). The microscope view showed that the complete array ITO film pattern was prepared on the PDMS flexible substrate.  We believe these results hold promise for a variety of applications from flexible electronics to lab-chip devices, MEMS and medical implants.